Vertical cavity surface emitting laser (VCSEL) is an excellent laser light source with small volume, low threshold, easy integration, and array arrangement, and has been widely used in sensing, communication, medical instruments, processing, and other fields since its birth. However, the application of VCSELs in some fields is limited, such as laser processing, projection and display, and medical equipment, because the laser light is a Gaussian distribution with concentrated energy. TopHat beams have received extensive attention due to their uniform distribution of energy over the spot area. In this paper, we tightly combine the metasurface with the VCSEL by means of on-chip integration and realize a metasurface-integrated VCSEL (MS-VCSEL) that can directly output the TopHat beam. The standard deviation is used to calculate the test results, and the uniformity of the spot was 70.5%. This work has important implications for the design of chip-scale optical systems, making it possible for laser chips with TopHat beams as light sources to be applied in future products.
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