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Dr. Zhongye Xie
at Institute of Optics and Electronics CAS
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Publications (1)
Proceedings Article | 30 January 2019 Paper
Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy
Zhongye Xie, Yan Tang, Xi Liu, Kejun Yang, Song Hu
Proceedings Volume 10841, 1084105 (2019) https://doi.org/10.1117/12.2505137
KEYWORDS: Thin films, Modulation, Microscopy, Fourier transforms, Thin film devices, Phase shifts, Optoelectronic devices, Interferometry, Semiconducting wafers, Optical components
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