Ultra-precision measurement technology is the cornerstone of ultra-precision machining and manufacturing technology, and is an essential component of the national modern advanced measurement system. chromatic confocal sensors (CCS), with their advantages of high accuracy, fast measurement speed, wide adaptability to tested surface, and non-contact measurement capability, have become an important research hotspot in the field of ultra-precision measurement. Due to the low scanning efficiency of point chromatic confocal sensors, which can only obtain height information for a single point at a time, line chromatic confocal sensors (LCCS) has developed rapidly in recent years. The LCCS can simultaneously obtain height information for thousands of points (such as 2048 points) along a line, and the three-dimensional topography of the measured surface can be obtained through several one-dimensional scans, greatly improving measurement efficiency. It has been widely applied in various advanced manufacturing fields. Firstly, the working principle of the LCCS is introduced, and the key components affecting its performance are analyzed. Then, the research progress of the LCCS is introduced, followed by the research progress of its metrological calibration. Next, the measurement applications of the LCCS are summarized. Finally, the application development of the LCCS are summarized and prospected.
The laser scanning interference method requires the optical frequency emitted by the tunable laser be ideally linear with time. However, the laser is affected by the mechanical control precision and the influence of carriers in the gain medium. It is difficult to meet this requirement. The spectrum of the target spectrum will be widened, leading to a serious decrease in measurement accuracy and resolution. The optical frequency sampling method can eliminate the influence of the time domain nonlinearity of the frequency sweep in principle by sampling the frequency sweeping interferometric signal in the optical frequency domain. However, this method is limited by the Nyquist Sampling Theorem. It requires that the optical path difference of the system's auxiliary interferometer should be at least 2 times of the measuring optical path, which seriously reduces the theoretical measurement range of the frequency sweep interference determined by the coherence length of the laser. In response to this problem, the paper puts forward the phase shift frequency sampling method. When the optical path exceeds 1/2 of the optical path of the auxiliary interferometer, by introducing the phase-shifting factor, the measured signal is shifted according to the phase of the auxiliary interferometer signal, so that the frequency of the measured beat signal after phase-shifting is less than 1/2 of the frequency of the auxiliary beat signal, which satisfies the Nyquist sampling theorem in principle, and breaking through the measurement range limitation based on the frequency sampling method. Through simulation experiments, comparing the traditional frequency sampling method and phase shift frequency sampling method, the effectiveness of the method is verified and the condition of the phase-shift factor is given.
High resolution and simple device ranging technology has prospects of broad application and attractive. Laser frequency scanning interferometer has capability of high-resolution, low-noise ratio measurement. The tuning nonlinearity is a main factor limited to the ranging resolution which needs to be corrected. When using hardware to correct laser tuning nonlinearity, it would increases the complexity of the instrument structure. For the purpose of making structure of the instrument much simple, we proposed a method that using fiber reference channel to compensate the nonlinearity of measurement path beat frequency, which can achieve high resolution measurement. The method require obtaining the reference and measurement path beat signal simultaneously, then extracting the phase of the reference channel signal which is formed by fiber end face to compensate the nonlinearity of measurement signal. Hilbert transform is used to calculate the phase of signal, and empirical mode decomposition (EMD) method is used to reduce the noise of reference signal. The laser frequency scanning interferometer is demonstrated by experiment, we show that this performance enables 132μm for 10nm tuning bandwidth over several meter range. The method does not need to estimate the tuning nonlinearity function, so it could reduce the complexity of algorithm.
Absolute distance measurement systems are of significant interest in the field of metrology, which could improve the manufacturing efficiency and accuracy of large assemblies in fields such as aircraft construction, automotive engineering, and the production of modern windmill blades. Frequency scanning interferometry demonstrates noticeable advantages as an absolute distance measurement system which has a high precision and doesn’t depend on a cooperative target. In this paper , the influence of inevitable vibration in the frequency scanning interferometry based absolute distance measurement system is analyzed. The distance spectrum is broadened as the existence of Doppler effect caused by vibration, which will bring in a measurement error more than 103 times bigger than the changes of optical path difference. In order to decrease the influence of vibration, the changes of the optical path difference are monitored by a frequency stabilized laser, which runs parallel to the frequency scanning interferometry. The experiment has verified the effectiveness of this method.
The influence of a fiber dispersion calibration interferometer on the measurement results for a large-scale high-resolution broadband frequency-modulated continuous wave (FMCW) measurement system was studied. A model was constructed to simulate the influences of fiber dispersion on the measurements when using a frequency sampling method that corrects the tuning nonlinearity. The results indicated that a broadband external cavity tunable laser, in comparison with a semiconductor laser, causes linear variations in the measurement results because of the effect of the fiber dispersion in the calibration interference path for large-scale high-resolution measurements, and these variations decreased the resolution of the measurements. A method that combines chirp slope calibration and phase compensation to reduce the effects of the fiber dispersion was proposed. A gauge block with a height difference of 200 μm at a distance of 2.43 m was measured during the experiments. Before calibrating the fiber dispersion, the frequency spectrum showed false peaks, and it was difficult to distinguish the peaks of the targets. After compensating for the dispersion, the peaks of the targets could be clearly distinguished, and a height difference of 199.6 μm was measured. Using this model and the method to compensate for the dispersion will provide a reference for large-scale high-resolution broadband FMCW laser measurements.
KEYWORDS: LIDAR, Signal processing, Frequency modulation, Modulation, Detection and tracking algorithms, Linear filtering, Spectral resolution, Zoom lenses, Fourier transforms, Ranging
Range accuracy and efficiency are two important indicators for Frequency modulated continuous wave (FM/CW) laser radar, improving the accuracy and efficiency of extracting beat frequency are key factors for them. Multiple Modulation Zoom Spectrum Analysis (ZFFT) and the Chirp-Z Transform (CZT) are two widely used methods for improving frequency estimation. The paper through analyze advantages and disadvantages of these methods, proposes a high accuracy and fast signal processing method which is ZFFT-CZT, it combines advantages that ZFFT can reduce data size, and CZT can zoom in frequency of any interested band. The processing of ZFFT-CZT is following: firstly ZFFT is conducted by conducting Fourier transform on short time signal to calculate amount of frequency shift, and transforming high-frequency signal into low-frequency signal of long time sampling, then CZT is conducted by choosing any interested band to continue subdividing the spectral peaks, which can reduce picket fence effect. By simulate experiment based on ZFFT-CZT method, two closed targets at distance of 50m and 50.001m are measured, and the measurement errors are 40μm and 34μm respectively. It proved that ZFFT-CZT has a small amount of calculation, which can meet the requirement of high precision frequency extraction.
This article uses the external cavity laser to realize FMCW high precision absolute distance measurement, as the external cavity laser owns the advantage of large tuning range of frequency. Firstly, aim at the problem of nonlinear tuning of the external cavity laser, a study of method of frequency-sampling has been shown. Secondly, in this article the mathematical model of the absolute dis tance measurement system has been established, and the sources of the errors of the FMCW absolute distance measurement has been analyzed, and the accuracy model has been established. Finally, a ball which is put at a distance about 3 meters is measured, and the random error is 0.3479μm, the standard uncertainty of measurement system is 0.3479μm+3.141Rppm.
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