Yana Branzburg
at Applied Materials Israel Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295517 (2024) https://doi.org/10.1117/12.3012913
KEYWORDS: Shrinkage, Etching, Extreme ultraviolet, Photoresist materials, Metrology, Semiconducting wafers, Extreme ultraviolet lithography, Photoacid generators, Stochastic processes, Critical dimension metrology

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top