The axicon is a rotationally symmetrical optical element along the optical axis of the focal line, including concave shaft cone and convex shaft cone. It is widely used in laser beam shaping, laser drilling, optical detection, laser resonator and lithography illumination due to the property of long focal length and narrow transverse width. The axicon has only one optical axis, and the curvature radius of each point of the surface is different in the direction of the optical axis, that is, the line is a straight line, but the points of the adjacent bus are really circular torus, and the traditional equipment is difficult to polish. A new process suitable for axicon processing is proposed, including forming, traditional polishing, Atmospheric Pressure Plasma Processing for surface correction, flexible asphalt discs for smoothing. With it, the convergence of the polishing process is significantly improved, and the PV is decreases from 27λ to 3λ. There are two main factors that affect processing efficiency: temperature and gas flow rate. An analytical method is selected to estimate the complex interaction between the temperature field analysis and the polishing efficiency during the polishing process, and it is possible to achieve efficient and determined process.
In order to study the mist phenomenon on phosphate glass, the chemical composition of the hydrolysis layer on the glass surface of phosphate glass was investigated. The solid and liquid components of the used slurry and the surface composition of polished phosphate glass were tested. The experimental results show that the SIMS test results show that the content of K does not change with depth, and the content of Mg, Al, Nd firstly increases with depth and then tends to be gentle; K element does not participate in chemical reactions during polishing, just simply mechanical removed; but Mg, Al, and Nd elements are not only mechanically removed but also participate in chemical reactions and are precipitated as ions, which is consistent with the XRF test results. It is proposed a new substance generated on the surface of phosphate glass during polishing process, a hydrolysis layer formation model was proposed. The mist phenomenon is related to the hydrolysis layer, which is different from the substrate material and properties (density, light reflectance, etc.). So different scattered light is seen and the thicker the hydrolyzed layer, the stronger the scattered light. Moreover, the severity of mist is related to the thickness of the mist layer, and the thicker the thickness, the more severe the mist.
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