We proposed and demonstrated a hitless wavelength channel selective switch (hitless tunable Add/Drop filter) using Thermo-Optic (TO) effect of double series coupled dielectric microring resonator. Using a dielectric material as the core, the response time was reduced to 105 μs (rise time) and 15 μs (fall time), which are fifteen-fold and hundred-fold faster than that of polymer material, and the reproducibility by the heat cycle test was also improved to less than 0.01nm. The tuning range of wavelength selective switch was expanded to 13.3nm using the Vernier effect, and a large extinction ratio of more than 20dB was realized. In this review, the principle and recent progress of microring resonator wavelength selective switch will be introduced.
We have proposed and demonstrated a vertically coupled microring resonator filter as an Add/Drop wavelength filter. The ultra-compact ring resonantor can be realized by the ultra-high index contrast waveguide (=34%) consisting of glass core (n=1.80) and air cladding and the vertically coupled configuration, where a microring resonator with a few tens micron radius is stacked on the crossing point of cross-grid bus waveguides. The cross-grid topology of busline waveguides and very small ring radius enables a dense integration of filter circuit. To achieve the 3D integration, we developed a novel fabrication process of flat-top waveguide using a so-called lift-off process and the SOG (Spin-On-Glass), and successfully obtained a very smooth and flat surface of lower waveguide with a step height less than 0.01μm. In addition, to manipulate the center wavelength after fabrication, we developed two trimming methods; one is the use of UV-sensitive polymer for the over-cladding, and the other is the direct UV irradiation to the ring ocre made of Ta2O5-SiO2 compound glass. Utilizing the former method, the channel spacing of filter array was precisely controlled within 0.5nm, which can not be achieved by the control of ring radius.
Conference Committee Involvement (2)
Integrated Optics: Devices, Materials, and Technologies VIII
26 January 2004 | San Jose, CA, United States
Integrated Optics: Devices, Materials, and Technologies VII
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