Dr. YoongHee Na
at Korea Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 March 2014 Paper
Jin Hee Bae, Kwen Woo Han, Eun Su Park, Hui Chan Yoon, Yoong Hee Na, Jin Woo Seo, Wan Hee Lim, Bo Sun Kim, Jun Young Jang, Younjin Cho
Proceedings Volume 9051, 90511R (2014) https://doi.org/10.1117/12.2046098
KEYWORDS: Dielectrics, Silicon, Silica, Oxides, Semiconductors, Etching, Resistance, Manufacturing, Polymers, Plasma

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