Mr. Yu-Hao Shih Profile

Yu-Hao Shih

Staff Engineer at United Microelectronics Corp

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Publications (1)

Proceedings Article | 5 April 2007 Paper

45nm design rule in-die overlay metrology on immersion lithography processes

Yu-Hao Shih, George KC Huang, Chun-Chi Yu, Mike Adel, Chin-Chou Kevin Huang, Pavel Izikson, Elyakim Kassel, Sameer Mathur, Chien-Jen Huang, David Tien, Yosef Avrahamov

Proceedings Volume 6518, 651831 (2007) https://doi.org/10.1117/12.711754

KEYWORDS: Overlay metrology, Metrology, Semiconducting wafers, Scanners, Immersion lithography, Statistical modeling, Optical lithography, Data modeling, Optical alignment, Reticles

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