Mr. Yury V. Larionov Profile

Yury V. Larionov

R&D at General physics institute

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 31 January 2022 Paper

Uncertainty of the linewidth of a nanoobject at control it in a low-voltage SEM

Yu. Larionov, Yu. Ozerin

Proceedings Volume 12157, 121571R (2022) https://doi.org/10.1117/12.2624223

KEYWORDS: Remote sensing, Calibration, Scanning electron microscopy, Atomic force microscopy, Transmission electron microscopy, Silicon, Metrology, Fabry–Perot interferometers, Electron beams, Distance measurement

Read Abstract +

Proceedings Article | 8 January 2013 Paper

Detection of processes inducing profile changes of relief structures in SEM by analysis of their distorted images

Yu. Larionov, Yu. Novikov

Proceedings Volume 8700, 87000Z (2013) https://doi.org/10.1117/12.2016999

KEYWORDS: Contamination, Distortion, Scanning electron microscopy, Particles, Image processing, Diffusion, Silicon, Crystals, Electron beams, Raster graphics

Read Abstract +

Proceedings Article | 8 January 2013 Paper

Virtual scanning electron microscope

Yu. Larionov, Yu. Novikov

Proceedings Volume 8700, 87000X (2013) https://doi.org/10.1117/12.2016977

KEYWORDS: Scanning electron microscopy, Monte Carlo methods, Electron microscopes, Calibration, Instrument modeling, Software, Clocks, Image acquisition, Device simulation, Nanotechnology

Read Abstract +

Proceedings Article | 8 January 2013 Paper

Effective probe for scanning electron microscope

Yu. Larionov, Yu. Novikov

Proceedings Volume 8700, 87000Y (2013) https://doi.org/10.1117/12.2016917

KEYWORDS: Scanning electron microscopy, Electron microscopes, Silicon, Data modeling, Physics, Optical inspection, Nanostructures, Selenium, Detection theory, Nanoelectronics

Read Abstract +

Proceedings Article | 8 January 2013 Paper

Mechanisms of image formation in SEM

Yu. Larionov, Yu. Novikov

Proceedings Volume 8700, 87000W (2013) https://doi.org/10.1117/12.2016850

KEYWORDS: Scanning electron microscopy, Image acquisition, Image registration, Electron microscopes, Mathematical modeling, Nanoelectronics, Calibration, Sensors, Data modeling, Scattering

Read Abstract +

Proceedings Article | 31 July 2007 Paper

Nonlinear optical phenomena in phosphosilicate glass under 193 nm laser irradiation

Y. Larionov, V. Plotnichenko

Proceedings Volume 6728, 67283G (2007) https://doi.org/10.1117/12.752473

KEYWORDS: Absorption, Glasses, Chemical species, Polysomnography, Phosphosilicate glass, Silica, Switches, Laser irradiation, Silicate glass, Raman scattering

Read Abstract +

Showing 5 of 6 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years