Zecheng Liu
at ASM Japan KK
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper
A. Turnquist, N. Kofuji, J. Sebastian, Z. Liu, H. Kou, H. Fukuda, Y. Tomczak, Y. Sun, D. Piumi, D. Roest
Proceedings Volume 12499, 1249904 (2023) https://doi.org/10.1117/12.2661307
KEYWORDS: Tin, Coating stress, Etching, Plasma, Plasma etching, Surface roughness, Scanning electron microscopy, Film thickness, Line edge roughness, Deformation

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980R (2023) https://doi.org/10.1117/12.2660376
KEYWORDS: Film thickness, Extreme ultraviolet lithography, Etching, Adhesion, Line width roughness, Line edge roughness, Surface roughness, Lithography, Interfaces

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