Mr. Changlong Chen Profile

Changlong Chen

at Institute of Optics and Electronics CAS

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Proceedings Article | 21 August 2014 Paper

Intelligent control system based on ARM for lithography tool

Changlong Chen, Xiaoping Tang, Song Hu, Nan Wang

Proceedings Volume 9283, 92830K (2014) https://doi.org/10.1117/12.2068565

KEYWORDS: Lithography, Control systems, Intelligence systems, Video, Internet, Operating systems, Electromagnetism, Human-computer interaction, Control systems design, Video processing

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The control system of traditional lithography tool is based on PC and MCU. The PC handles the complex algorithm, human-computer interaction, and communicates with MCU via serial port; The MCU controls motors and electromagnetic valves, etc. This mode has shortcomings like big volume, high power consumption, and wasting of PC resource. In this paper, an embedded intelligent control system of lithography tool, based on ARM, is provided. The control system used S5PV210 as processor, completing the functions of PC in traditional lithography tool, and provided a good human-computer interaction by using LCD and capacitive touch screen. Using Android4.0.3 as operating system, the equipment provided a cool and easy UI which made the control more user-friendly, and implemented remote control and debug, pushing video information of product by network programming. As a result, it’s convenient for equipment vendor to provide technical support for users. Finally, compared with traditional lithography tool, this design reduced the PC part, making the hardware resources efficiently used and reducing the cost and volume. Introducing embedded OS and the concepts in “The Internet of things” into the design of lithography tool can be a development trend.

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