Prof. Dacheng Zhang Profile

Prof. Dacheng Zhang

Vice Director at Peking Univ

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Publications (12)

Proceedings Article | 20 June 2024 Poster + Paper

Research on frequency measurement of the uncooled infrared MEMS resonance sensor

Xia Zhang, Dacheng Zhang

Proceedings Volume 12999, 1299933 (2024) https://doi.org/10.1117/12.3026506

KEYWORDS: Resonators, Electrodes, Infrared radiation, Infrared sensors, Capacitors, Microelectromechanical systems, Vibration, Signal processing, Capacitance

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Proceedings Article | 2 January 2018 Paper

Analysis of driving force and exciting voltage for a bi-material infrared resonator

Xia Zhang, Dacheng Zhang

Proceedings Volume 10456, 104565F (2018) https://doi.org/10.1117/12.2282528

KEYWORDS: Resonators, Electrodes, Infrared sensors, Sensors, Capacitors, Infrared radiation, Infrared detectors, Gold, Silicon

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SPIE Journal Paper | 7 August 2015

Thermal expansion mismatch resonant infrared sensor and array

Xia Zhang, Dacheng Zhang

OE, Vol. 54, Issue 08, 087102, (August 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.8.087102

KEYWORDS: Infrared sensors, Sensors, Electrodes, Thermography, Infrared radiation, Temperature metrology, Resonators, Thermal effects, Silicon, Gold

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Proceedings Article | 17 October 2014 Paper

Bi-material resonant infrared thermal detector and array

Xia Zhang, Dacheng Zhang

Proceedings Volume 9248, 92480A (2014) https://doi.org/10.1117/12.2066818

KEYWORDS: Infrared sensors, Sensors, Infrared radiation, Thermography, Structural sensing, Electrodes, Temperature metrology, Infrared detectors, Gold, Oscillators

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Proceedings Article | 10 September 2002 Paper

Wafer lever packaging for gyroscope by Au/Si eutectic bonding

Yong Ruan, Dacheng Zhang, Zhenchuan Yang, Xiang Wang, Xiaomei Yu

Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483165

KEYWORDS: Silicon, Microelectromechanical systems, Semiconducting wafers, Packaging, Gold, Gyroscopes, Wafer bonding, Sensors, Manufacturing, Integrated circuits

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Proceedings Article | 15 October 2001 Paper

Design and fabrication of a novel micromechanical variable optical attenuator

Cong-Shun Wang, Hongju Li, Jing Fang, Dacheng Zhang, Sheng Chang

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444755

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Proceedings Article | 15 October 2001 Paper

Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability

Wei Zhang, Xinping Cao, Bei Liu, Dacheng Zhang

Proceedings Volume 4600, (2001) https://doi.org/10.1117/12.444673

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Proceedings Article | 15 October 2001 Paper

DEM microfabrication technique and its applications in bioscience and microfluidic systems

Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, Dacheng Zhang

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444704

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Proceedings Article | 30 April 2001 Paper

Electromechanical analysis of microelectromechanical structures and dynamic simulations of laterally vibratory microgyroscope

Jing Fang, W. Zhang, C. Wang, Z. Li, D. Zhang

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425335

KEYWORDS: Microelectromechanical systems, Finite element methods, Gyroscopes, Electrodes, Electromechanical design, Motion analysis, Vibration simulation, Microsystems, Chemical elements, Actuators

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Proceedings Article | 11 October 2000 Paper

Effect of morphine on PC12 cells with molecular radar

Chen Shi, Xiaoli Yu, Jiuyi Lu, Chunyang Zhang, Lei Jin, Hui Ma, Dacheng Zhang, Die Yan Chen

Proceedings Volume 4224, (2000) https://doi.org/10.1117/12.403977

KEYWORDS: Radar, Calcium, Cell death, Luminescence, Medicine, Microscopy, Confocal microscopy, Receptors, Lutetium, Inflammation

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Proceedings Article | 21 June 2000 Paper

Novel silicon cap package technology for monolithic microinertial measurement unit

Zhihong Li, Dacheng Zhang, Yilong Hao, Ting Li, Ying Wang, Guoying Wu

Proceedings Volume 3990, (2000) https://doi.org/10.1117/12.388914

KEYWORDS: Silicon, Gyroscopes, Semiconducting wafers, Microelectromechanical systems, Glasses, Etching, Sensors, Wafer bonding, Capacitance, Actuators

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Proceedings Article | 10 March 1999 Paper

DEM technique: a new three-dimensional microfabrication technique for nonsilicon materials

Di Chen, Dacheng Zhang, Guifu Ding, Xiaolin Zhao, Jilin Zhang, Cunsheng Yang, Bingchu Cai

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341181

KEYWORDS: Silicon, Fabrication, High aspect ratio silicon micromachining, Metals, Synchrotron radiation, X-ray sources, X-rays, Photomasks, Microfabrication, Ceramics

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Showing 5 of 12 publications

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