Mr. Shinji Mizutani Profile

Shinji Mizutani

at TASMIT Inc

SPIE Involvement:

Author

Websites:

Company Website

Publications (3)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

High-performance denoiser based on deep learning trained by precisely reproduced SEM noise

Taihei Mori, Yosuke Okamoto, Masahiro Oya, Shinji Mizutani, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki

Proceedings Volume 12053, 120531D (2022) https://doi.org/10.1117/12.2615750

KEYWORDS: Scanning electron microscopy, Anisotropy, Denoising, Inspection, Data modeling, Image denoising, Neural networks, Metrology, Image processing, Algorithm development

Read Abstract +

Proceedings Article | 26 March 2019 Paper

E-beam inspection of single exposure EUV direct print of M2 layer of N10 node test vehicle

Sayantan Das, Ryo Shimoda, Shinji Mizutani, Sandip Halder, Kotaro Maruyama, Philippe Leray, Yuichiro Yamazaki

Proceedings Volume 10959, 109590H (2019) https://doi.org/10.1117/12.2515809

KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Metrology, Extreme ultraviolet lithography, Distortion, Logic, Metals, Extreme ultraviolet, Inspection, Semiconducting wafers

Read Abstract +

Proceedings Article | 16 July 2002 Paper

Evaluation of lithographic imaging performance by optical area measurement

Ilya Grodnensky, Shinji Mizutani, Steve Slonaker

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473410

KEYWORDS: Critical dimension metrology, Cadmium sulfide, Scanning electron microscopy, Lithography, CCD cameras, Microscopes, Optical testing, Metrology, Cameras, Optical imaging

Read Abstract +

Conference Committee Involvement (1)

Photomask and Next-Generation Lithography Mask Technology XIII

18 April 2006 | Yokohama, Japan

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years