Ms. Yunyun Hao Profile

Yunyun Hao

Student at Institute of Microelectronics of the CAS

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Publications (4)

Proceedings Article | 25 May 2022 Poster + Paper

Calibration of chemically amplified resist model to consider the top loss in projection lithography

Yunyun Hao, Lisong Dong, Yayi Wei

Proceedings Volume 12055, 120550R (2022) https://doi.org/10.1117/12.2613988

KEYWORDS: Calibration, Data modeling, Photoresist processing, Chemically amplified resists, Lithography

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Proceedings Article | 12 October 2021 Presentation + Paper

Acceleration method for source mask optimization at 7nm technology node

Xiaojing Su, Lisong Dong, Yunyun Hao, Yajuan Su, Yayi Wei

Proceedings Volume 11855, 118550Y (2021) https://doi.org/10.1117/12.2600884

KEYWORDS: Source mask optimization, Lithography, SRAF, Photomasks, Etching, Optical lithography

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Proceedings Article | 26 September 2019 Paper

Impact of EUV multilayer mask defects on imaging performance and its correction methods

Yunyun Hao, Lisong Dong, Xi Chen, Rui Chen, Taian Fan, Yayi Wei, Tianchun Ye

Proceedings Volume 11147, 111471B (2019) https://doi.org/10.1117/12.2536707

KEYWORDS: Photomasks, Extreme ultraviolet, Lithography, Deep ultraviolet, Reflectivity, Manufacturing, Polishing, Plasma etching, Optical proximity correction, Extreme ultraviolet lithography

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Proceedings Article | 24 October 2017 Paper

The calculation and representation of polarization aberration induced by 3D mask in lithography simulation

Yunyun Hao, Yanqiu Li, Tie Li, Naiyuan Sheng

Proceedings Volume 10460, 104601J (2017) https://doi.org/10.1117/12.2285267

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