Terahertz modulators based on frequency-tunable metamaterials are designed, produced and investigated. It is shown that optimization of the substrate thickness allows to increase the modulation depth and reduce the insertion loss of the modulator. Enhancement mechanism of higher-order resonant modes in densely packed resonator arrays is suggested. It is demonstrated that the resonant frequency of the fifth order plasmonic mode can be effectively tuned which makes the device attractive for practical applications.
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