Prof. YanQiu Li Profile

Prof. YanQiu Li

at Beijing Institute of Technology

SPIE Involvement:

Author | Editor

Publications (114)

Proceedings Article | 15 January 2025 Open Access

Automatic detection technology and application of high-performance Stokes-Mueller imaging polarimeter

Yujie Hu, Xiang Ma, Meng Zheng, LiHui Liu, YanQiu Li

Proceedings Volume 13513, 135130P (2025) https://doi.org/10.1117/12.3045391

KEYWORDS: Mueller matrices, Polarimetry, Polarization, Biological imaging, Equipment, Calibration, Imaging systems, Biological samples, Image processing, Data processing

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Proceedings Article | 13 December 2024 Paper

Phase microscopy using the quadriwave lateral shearing interferometer with continuously variable shear ratio

Hui Zhong, Yanqiu Li, Ke Liu, Xiaotian Zhang, Xiting Han, Tao Wang

Proceedings Volume 13501, 135010E (2024) https://doi.org/10.1117/12.3048029

KEYWORDS: Diffraction, Interferograms, Diffraction gratings, Shearing interferometers, Optical microscopy, Microscopy

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Proceedings Article | 13 December 2024 Paper

High-performance Mueller matrix imaging polarimeter based on liquid crystal variable retarders

Xiang Ma, Jinxian Wu, Yujie Hu, Yanqiu Li

Proceedings Volume 13501, 135010F (2024) https://doi.org/10.1117/12.3048047

KEYWORDS: Mueller matrices, Equipment, Polarimetry, Liquid crystals

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Proceedings Article | 10 December 2024 Paper

Zernike polynomial-based pupil wavefront optimization technology for extreme ultraviolet lithography

Miao Yuan, Zhaoxuan Li, He Yang, Zhen Li, Yuqing Chen, Yanqiu Li

Proceedings Volume 13423, 134231K (2024) https://doi.org/10.1117/12.3055164

KEYWORDS: Wavefronts, Zernike polynomials, Pupil aberrations, Extreme ultraviolet lithography, Mathematical optimization, Wavefront aberrations, Lithography, Wavefront errors, Extreme ultraviolet, Light sources

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Proceedings Article | 10 December 2024 Paper

Fast lithographic source optimization adopting RMSProp with iterative shrinkage-thresholding algorithm compressive sensing for high fidelity patterning

Zhen Li, He Yang, Miao Yuan, Zhaoxuan Li, Yuqing Chen, Yanqiu Li

Proceedings Volume 13423, 134230H (2024) https://doi.org/10.1117/12.3052755

KEYWORDS: Lithography, Compressed sensing, Mathematical optimization, Machine learning, Matrices, Optical lithography, Semiconducting wafers, Lithium, Light sources and illumination, Light sources

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Proceedings Article | 10 December 2024 Paper

Enabling source and mask optimization by a dynamic aberration imaging model across the full exposure field

Zhaoxuan Li, Miao Yuan, He Yang, Zhen Li, Yuqing Chen, Yanqiu Li

Proceedings Volume 13423, 134230U (2024) https://doi.org/10.1117/12.3052955

KEYWORDS: Source mask optimization, Lithography, Matrices, Image quality, Pulse signals, Light sources, Deep ultraviolet, Lithium, Semiconducting wafers, Pulsed laser operation

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Proceedings Article | 10 December 2024 Paper

Fast curvilinear optical proximity correction adopting quasi-uniform B-spline curves

He Yang, Zhen Li, Miao Yuan, Zhaoxuan Li, Yanqiu Li

Proceedings Volume 13423, 134230S (2024) https://doi.org/10.1117/12.3052949

KEYWORDS: Optical proximity correction, Microchannel plates, Particle swarm optimization, Source mask optimization, Point spread functions, Lithography, Printing, Mathematical optimization, Lithium, Imaging systems

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Proceedings Article | 24 November 2023 Paper

Vascular imaging of in vivo human skin using a fiber-based PS-OCT system

Guoqiang Chen, Jipeng Ding, Wen'ai Wang, Yanqiu Li

Proceedings Volume 12935, 129350L (2023) https://doi.org/10.1117/12.3003964

KEYWORDS: Imaging systems, Skin, Polarization, Visualization, Vascular imaging, Signal detection, Optical coherence tomography, Biological samples, Angiography, Mirrors

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Proceedings Article | 10 May 2023 Paper

Light propagation equation for a double Stokes-Mueller polarimetry

Jinxian Wu, Yanqiu Li, Chunquan Lai, Jiaming Liu

Proceedings Volume 12554, 125541D (2023) https://doi.org/10.1117/12.2651966

KEYWORDS: Second-harmonic generation, Polarimetry, Polarization, Geometrical optics, Polysomnography, Optical components, Optical design, Linear polarizers, Transition metals, Signal generators

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Proceedings Article | 20 January 2023 Paper

The optimal measurement matrix with minimal condition number for double Stokes-Mueller polarimetry

Chunquan Lai, Yanqiu Li, Jingxian Wu, Jiaming Liu

Proceedings Volume 12560, 125600B (2023) https://doi.org/10.1117/12.2652088

KEYWORDS: Wave plates, Condition numbers, Polarization, Polarimetry, Polysomnography, Optical testing, Polarizers, Tissues, Mathematical modeling, Imaging systems

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Proceedings Article | 15 December 2022 Paper

High noise-resistant slope and curvature signal extraction algorithm in frequency domain for the Shack-Hartmann wavefront sensor

Fei He, Ke Liu, Yanqiu Li, Peng Qin, Hui Zhong, Xiaotian Zhang

Proceedings Volume 12478, 124783L (2022) https://doi.org/10.1117/12.2654845

KEYWORDS: Wavefronts, Wavefront sensors, Microlens, Microlens array, Fourier transforms, Wavefront reconstruction, Reconstruction algorithms, Monochromatic aberrations, Detection and tracking algorithms, Zernike polynomials

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Proceedings Article | 15 December 2022 Paper

Error analysis of rapid Stokes polarimetric imaging with circularly polarized illumination

Chenhui Long, Yanqiu Li, Jiaxin Wu, Guodong Zhou

Proceedings Volume 12478, 1247831 (2022) https://doi.org/10.1117/12.2654796

KEYWORDS: Polarimetry, Polarization, Error analysis, Tissues, Matrices, Light, Imaging systems

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Proceedings Article | 15 December 2022 Paper

Reliability investigation of Mueller matrix imaging polarimeter in identifying cervical intraepithelial neoplasia

Wen’ai Wang, Jiabei Li, Guoqiang Chen, Yanqiu Li

Proceedings Volume 12478, 1247814 (2022) https://doi.org/10.1117/12.2652153

KEYWORDS: Tissues, Polarization, Reliability, Diagnostics, Scattering, Polarimetry, Imaging systems, Cervix

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Proceedings Article | 15 December 2022 Paper

Breast cancer classification from histopathological images using transformers

Wen Yu, Yanqiu Li

Proceedings Volume 12478, 1247828 (2022) https://doi.org/10.1117/12.2654722

KEYWORDS: Transformers, Breast cancer, Image classification, Feature extraction, Medical imaging

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Proceedings Article | 16 September 2022 Paper

Full field wavefront error aware source and mask optimization for extreme ultraviolet lithography

PengZhi Wei, YanQiu Li, ZhaoXuan Li, Zhen Li, YiYu Sun

Proceedings Volume 12325, 123250Q (2022) https://doi.org/10.1117/12.2640681

KEYWORDS: Source mask optimization, Extreme ultraviolet lithography, Wavefronts, Photomasks, Extreme ultraviolet, Point spread functions, Lithography, Optimization (mathematics), Computational lithography, Lens design

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Proceedings Article | 13 December 2021 Paper

Lithographic exposure latitude aware source and mask optimization

Lulu Zou, Lihui Liu, Yiyu Sun, Pengzhi Wei, Miao Yuan, Zhaoxuan Li, Yaning Li, Yanqiu Li

Proceedings Volume 12073, 1207302 (2021) https://doi.org/10.1117/12.2604844

KEYWORDS: Source mask optimization, Photomasks, Lithography, Resolution enhancement technologies, Semiconducting wafers, Lithium, Image processing, Electroluminescence, Optical proximity correction, Lithographic illumination

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Proceedings Article | 13 December 2021 Paper

Contrast enhancement of polarization-sensitive optical coherence tomography skin images

Jipeng Ding, Guoqiang Chen, Yuanhe Li, Yanqiu Li

Proceedings Volume 12075, 1207506 (2021) https://doi.org/10.1117/12.2605255

KEYWORDS: Optical coherence tomography, Image contrast enhancement

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Proceedings Article | 13 December 2021 Paper

Polarization aberration in-situ measurement in lithography tools

Yuanhe Li, Jianhui Li, Yanqiu Li, Guodong Zhou

Proceedings Volume 12073, 120730O (2021) https://doi.org/10.1117/12.2604286

KEYWORDS: Projection systems, Polarization, Calibration, Lithography, Optical calibration, Polarizers, Optical testing, Charge-coupled devices, Sensors

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Proceedings Article | 13 December 2021 Paper

Comprehensive and quantitative characterization and analysis method of 3D mask effect for lithography simulation

Enze Li, Yanqiu Li, Yang Liu, Yiyu Sun, Pengzhi Wei

Proceedings Volume 12073, 120730F (2021) https://doi.org/10.1117/12.2604846

KEYWORDS: Photomasks, Polarization, 3D modeling, Lithography, Projection systems, Analytical research, Fourier transforms

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