Al2O3 monolayer films were deposited on fused silica substrate and K9 glass substrate by electron-beam deposition. Annealing as a general post-treatment was used to enhance the quality of the Al2O3 coatings. The optical properties of the films were analyzed from the transmission spectra of the samples. The composition of the samples before and after annealing were measured by X-ray photoelectron spectroscopy (XPS). According to the analysis of the results, it can be found that the oxidation degree of the coatings increases after annealing in O2 inside coating chamber. The laser-induced damage thresholds of the Al2O3 films can be increased after the annealing process. Finally, the damage morphologies of the Al2O3 coatings were analyzed.
Hafnia-silica (HfO2/SiO2) mixed thin films with a wide range of different compositions have been deposited on fused silica substrate by E-beam co-evaporation. The change in composition is achieved by changing the deposition rates of individual materials. The transmittance spectra are measured by the spectrometer, and then the refractive indexes are calculated with Essential Macleod. The vertical uniformity and grain structure of the films are analyzed by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The experimental results demonstrate that the coatings have good uniformity, and all the films are amorphous except the pure HfO2 film. In addition, the mixed coating with about 16.85% SiO2 content has a higher refractive index than the pure HfO2 coating.
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