Non-contact surface profiling using optical interferometric microscopy

Diego Palacios; Bowen Zhai; Zihao Liu; Michael R. Wang

doi:10.1117/12.2650610

8 March 2023 Non-contact surface profiling using optical interferometric microscopy

Diego Palacios, Bowen Zhai, Zihao Liu, Michael R. Wang

Proceedings Volume 12428, Photonic Instrumentation Engineering X; 1242814 (2023) https://doi.org/10.1117/12.2650610
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We report the use of non-contact optical interferometric microscopy (OIM) for surface topographic profiling. A Linnik optical configuration is used to create interferograms of an object surface. When the coherence condition between the two beams is met the phase information of the object surface can be extracted to establish its topographic contour image. Using a four-image phase-shifted algorithm with the synchronization of a piezoelectric actuator reference mirror positioning, the present single camera OIM can reconstruct a surface topography with a field of view of 312 μm × 234 μm, axial resolution of 3.31 nm, and lateral resolution of 488 nm, and an estimated maximum topography depth of 270 nm.

Citation Download Citation

Diego Palacios, Bowen Zhai, Zihao Liu, and Michael R. Wang "Non-contact surface profiling using optical interferometric microscopy", Proc. SPIE 12428, Photonic Instrumentation Engineering X, 1242814 (8 March 2023); https://doi.org/10.1117/12.2650610

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available