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In this paper we briefly review some of the efficiency and energy scaling issues that are important in rare gas halide lasers. We use the KrF laser as a specific example and show that for this laser these issues are now sufficiently well understood so that optimum laser operating regimes can be chosen and theoretical performance predictions can be made. The other rare gas halide systems as well as the mercury halides are currently being actively investigated.
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J. Hsia, J. Jacob, J. Mangano, M. Rokni, "High-Power Rare-Gas Halide Lasers," Proc. SPIE 0138, Advances in Laser Technology III: Emphasizing Gaseous Lasers, (17 August 1978); https://doi.org/10.1117/12.956222