Integration Of Photodetectors And Optical Guided Wave Structures Formed On Silicon Substrates

J. T. Boyd; S. H. Chang; C. L. Fan; D. A. Ramey

doi:10.1117/12.965699

28 July 1981 Integration Of Photodetectors And Optical Guided Wave Structures Formed On Silicon Substrates

J. T. Boyd, S. H. Chang, C. L. Fan, D. A. Ramey

Proceedings Volume 0272, High Speed Photodetectors; (1981) https://doi.org/10.1117/12.965699
Event: 1981 Los Angeles Technical Symposium, 1980, Los Angeles, United States

Abstract

Various configurations of integrated photodetectors and optical guided wave structures will be discussed. Channel waveguide arrays integrated with charge-coupled devices (CCDs) formed on silicon have been used to perform transversal filtering, log detection, high quantum efficiency detection of X = .82μm, and high resolution imaging without requiring small detector array spacings. The latter is accomplished through use of a fan-out channel waveguide array. We shall also describe how computer simulation is utilized to predict crosstalk in linear imaging arrays. The simulation is based on analysis which includes the effects of focusing of the input light, the use of Kettler's equations to describe propagation in a lossy medium, and a solution of the generalized diffusion equation for excited carriers. Crosstalk for a conventional linear image array and one employing a fan-out channel waveguide array is evaluated and compared.

Citation Download Citation

J. T. Boyd, S. H. Chang, C. L. Fan, and D. A. Ramey "Integration Of Photodetectors And Optical Guided Wave Structures Formed On Silicon Substrates", Proc. SPIE 0272, High Speed Photodetectors, (28 July 1981); https://doi.org/10.1117/12.965699

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