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The resolution of hydrated biological specimens by soft x-ray microscopy is considered. This is set by damage to the specimen caused by secondary electrons and free radicals. Using synchrotron radiation the limit would be about 10 nm. By using short lived (~ 1 ns) sources as produced by a laser generated plasma, the Rayleigh limit of 2.3 nm should be possible.
R. J. Rosser
"Soft X-Ray Imaging Microscopy Using Zone Plates And Nonsynchrotron Sources", Proc. SPIE 0369, Max Born Centenary Conf, (16 June 1983); https://doi.org/10.1117/12.934448
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R. J. Rosser, "Soft X-Ray Imaging Microscopy Using Zone Plates And Nonsynchrotron Sources," Proc. SPIE 0369, Max Born Centenary Conf, (16 June 1983); https://doi.org/10.1117/12.934448