Digital Signal Processing Of Optical Monitoring By Means Of A Kalman Filter

M. Nixon; J. S. Seeley

doi:10.1117/12.935507

28 November 1983 Digital Signal Processing Of Optical Monitoring By Means Of A Kalman Filter

M. Nixon, J. S. Seeley

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935507
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

A Kalman filter algorithm has been applied to interpret the optical reflectance excursions during vacuum deposition of infrared coatings and multilayer thin-film filters. The application has been described in detail elsewhere and this paper now reports on-line experience for estimating deposition rate and thickness. The estimation proved sufficiently reliable to firstly 'navigate' regular manufacture (as controlled by a skilled operator) and to subsequently reproduce the skill without interpretation or intervention whilst maintaining exemplary product quality. Optical control by means of this Kalman filter application is therefore considered suitable as a basis for the automated manufacture of infrared coatings and multilayer thin-film filters.

Citation Download Citation

M. Nixon and J. S. Seeley "Digital Signal Processing Of Optical Monitoring By Means Of A Kalman Filter", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935507

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