Multiple Layer Techniques In Optical Lithography: Applications To Fine Line Mos Production

M A Listvan; M. Swanson; A. Wall; S A. Campbell

doi:10.1117/12.941894

29 June 1984 Multiple Layer Techniques In Optical Lithography: Applications To Fine Line Mos Production

M A Listvan, M. Swanson, A. Wall, S A. Campbell

Proceedings Volume 0470, Optical Microlithography III: Technology for the Next Decade; (1984) https://doi.org/10.1117/12.941894
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

The theory and practical concerns of multi-layer techniques using an anti-reflective polymer coating will be discussed. Anti Reflective Coating (ARC, Brewer Science, Inc.) was incorporated into the metal lithography process for a 1.2 micron gate CMOS prototype production line. Previously, reflections from substrate topography had caused a loss in linewidth control. These reflections were minimized by the ARC, which also restored process latitude. For the process described, ARC coating uniformity was ± nm, adhesion was good, and step coverage was seen to be adequate to 0.8 micron high verticle wall steps.

Citation Download Citation

M A Listvan, M. Swanson, A. Wall, and S A. Campbell "Multiple Layer Techniques In Optical Lithography: Applications To Fine Line Mos Production", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); https://doi.org/10.1117/12.941894

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available