VHSIC - A Test Bed For Advanced Lithography

Egbert D Maynard Jr.

doi:10.1117/12.941876

29 June 1984 VHSIC - A Test Bed For Advanced Lithography

Egbert D Maynard Jr.

Proceedings Volume 0470, Optical Microlithography III: Technology for the Next Decade; (1984) https://doi.org/10.1117/12.941876
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

The VHSIC program is, by now, quite well known to many of you. I would like, however, to take a few minutes to review both the origins and the current status of the VHSIC program and particularly those areas which relate to high resolution, high throughput lithography for submicron silicon integrated circuits.

Citation Download Citation

Egbert D Maynard Jr. "VHSIC - A Test Bed For Advanced Lithography", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); https://doi.org/10.1117/12.941876

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