Paper
7 July 1986 Laser Marking Of Passive Components, Hybrids And Semiconductors
J. F. Higgins
Author Affiliations +
Proceedings Volume 0611, Laser Processing of Semiconductors & Hybrids; (1986) https://doi.org/10.1117/12.956410
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
Pulsed CO2 TEA lasers are widely used in the electronics and semiconductor industries to mark passive components, hybrids and semiconductors. In addition to marking simple product identifying codes, an increasing requirement is to have the laser system mark variable information, derived from test results, on these products. This has required the development of laser beam delivery systems of increasing sophistication, capable of marking both alphanumerics and machine readable bar-codes, that are interfaced to test and process control equipment to permit high-speed, variable information coding.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. F. Higgins "Laser Marking Of Passive Components, Hybrids And Semiconductors", Proc. SPIE 0611, Laser Processing of Semiconductors & Hybrids, (7 July 1986); https://doi.org/10.1117/12.956410
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CITATIONS
Cited by 1 scholarly publication and 2 patents.
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KEYWORDS
Laser marking

Photomasks

Semiconductors

Semiconductor lasers

Beam delivery

Manufacturing

Pulsed laser operation

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