Set Up For Filter And Mirror Efficiencies Measurements In The UV and VUV Spectral Range

M Pouey; A. Malherbe

doi:10.1117/12.938366

13 October 1986 Set Up For Filter And Mirror Efficiencies Measurements In The UV and VUV Spectral Range

M Pouey, A. Malherbe

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938366
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

A vacuum reflectometer for the UV and VUV spectral range was developed for qualification of optical components below 400 nm. Typical performances, in the 120-320 nm spectral range, of filters and mirrors offered by MATRA will be presented. Fitted with various gratings and sources this device allows reflecting, transmitting power as well as scattered or diffracted flux measurements (gratings efficiency measurements) until 25 nm.

Citation Download Citation

M Pouey and A. Malherbe "Set Up For Filter And Mirror Efficiencies Measurements In The UV and VUV Spectral Range", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938366

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