Paper
11 January 1987 Air Bearings Machined On Ultra Precision, Hydrostatic CNC-Lathe
Pierre H. Knol, Denis Szepesi, Jan M. Deurwaarder
Author Affiliations +
Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941280
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
Micromachining of precision elements requires an adequate machine concept to meet the high demand of surface finish, dimensional and shape accuracy. The Hembrug ultra precision lathes have been exclusively designed with hydrostatic principles for main spindle and guideways. This concept is to be explained with some major advantages of hydrostatics compared with aerostatics at universal micromachining applications. Hembrug has originally developed the conventional Mikroturn ultra precision facing lathes, for diamond turning of computer memory discs. This first generation of machines was followed by the advanced computer numerically controlled types for machining of complex precision workpieces. One of these parts, an aerostatic bearing component has been succesfully machined on the Super-Mikroturn CNC. A case study of airbearing machining confirms the statement that a good result of the micromachining does not depend on machine performance alone, but also on the technology applied.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pierre H. Knol, Denis Szepesi, and Jan M. Deurwaarder "Air Bearings Machined On Ultra Precision, Hydrostatic CNC-Lathe", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); https://doi.org/10.1117/12.941280
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Cited by 1 scholarly publication.
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KEYWORDS
Spindles

Micromachining

Optical components

Surface finishing

Diamond

Control systems

Servomechanisms

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