Computer Controlled Ion Beam Machining For Precision Surface Finishing And Figuring

S. T. Davies; D. J. Whitehouse

doi:10.1117/12.941273

11 January 1987 Computer Controlled Ion Beam Machining For Precision Surface Finishing And Figuring

S. T. Davies, D. J. Whitehouse

Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941273
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Micromachining of mechanical structures by ion bombardment is reported. A 1.5 kV argon ion beam is used under computer control for workpiece stock removal. Generation of profiles with submicron precision is demonstrated and computer algorithms are used to predict machining conditions for producing specific surface characteristics and evaluating them geometrically.

Citation Download Citation

S. T. Davies and D. J. Whitehouse "Computer Controlled Ion Beam Machining For Precision Surface Finishing And Figuring", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); https://doi.org/10.1117/12.941273

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