Paper
9 February 1987 Theoretical Study Of The Aberrations Of A Simple Rotation XUV Monochromator, Using Conical Diffraction
J. Flamand, A. Thevenon, J. P . Laude, J. M. Lerner
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Abstract
This paper describes a comparison of image quality between a toroidal grating monochromator and a specific modified conical diffraction monochromator. it was found that for an equivalent dispersion in the XUV and grazing incidence, the image quality of both configurations is equivalent. Throughput advantages or disadvantages are dependent on the spectral range demanded by the user when compared to alternative monochromator configurations.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Flamand, A. Thevenon, J. P . Laude, and J. M. Lerner "Theoretical Study Of The Aberrations Of A Simple Rotation XUV Monochromator, Using Conical Diffraction", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941732
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Cited by 1 scholarly publication.
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KEYWORDS
Diffraction

Monochromators

LCDs

Diffraction gratings

Image quality

Moire patterns

Extreme ultraviolet

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