Numerical and experimental determinations of temporal characteristics of the SAW sensor 
with a chemi-sensitive layer of WO3+Pd

T. Hejczyk; E. Maciak; M. Setkiewicz

doi:10.1117/12.2243874

2 September 2016 Numerical and experimental determinations of temporal characteristics of the SAW sensor with a chemi-sensitive layer of WO₃+Pd

T. Hejczyk, E. Maciak, M. Setkiewicz

Author Affiliations +

Proceedings Volume 10034, 11th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods; 1003406 (2016) https://doi.org/10.1117/12.2243874
Event: 11th Integrated Optics - Sensors, Sensing Structures and Methods, 2016, Szczyrk, Poland

Abstract

The paper presents the results of numerical analyses of the surface acoustic wave (SAW) gas sensor based on WO₃ layer with a catalytic nanolayer of Pd. The changes of SAW velocity vs. the surface electrical conductivity of the sensing layer is a essence of sensors of this kind. The conductivity of the porous sensoric layer which is deposited on a piezoelectric waveguide depends on the profile of concentration of gaseous molecules diffused inside the sensing layer. The Knudsen’s model of gas diffusion was used. Results of numerical analysis of the effect of the gaseous CH₄ in air environment in the WO₃ sensoric layer have been shown. The results of numerical analysis allow to select conditions of the SAW sensor, including the morphology of the sensor layer, its thickness and operating temperature. Some numerical results were verified by means of experimental studies.

Citation Download Citation

T. Hejczyk, E. Maciak, and M. Setkiewicz "Numerical and experimental determinations of temporal characteristics of the SAW sensor with a chemi-sensitive layer of WO₃+Pd", Proc. SPIE 10034, 11th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, 1003406 (2 September 2016); https://doi.org/10.1117/12.2243874

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KEYWORDS

Sensors

Numerical analysis

Methane

Palladium

Diffusion

Molecules

Acoustics

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