A study on enhancing EUV resist sensitivity

Atsushi Sekiguchi; Tetsuo Harada; Takeo Watanabe

doi:10.1117/12.2255650

24 March 2017 A study on enhancing EUV resist sensitivity

Atsushi Sekiguchi, Tetsuo Harada, Takeo Watanabe

Proceedings Volume 10143, Extreme Ultraviolet (EUV) Lithography VIII; 1014322 (2017) https://doi.org/10.1117/12.2255650
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Studies have been carried out on developing a method for improving EUV resist sensitivity by enhancing EUV light absorption through the addition of metals having high EUV light absorption to the resist polymer in order to increase secondary electron emission, thereby enhancing PAG reactivity and improving acid generation efficiency^[1-3]. To confirm whether the addition of metals having high EUV light absorption actually does enhance sensitivity, study efforts included transmittance measurements and sensitivity evaluations of resist samples doped with ZrO₂ or TeO₂ nanoparticles, which have low and high EUV light absorption, respectively, in molar quantities of 0-2 relative to PAG. The samples were subjected to EUV exposure at the NewSUBARU synchrotron radiation facility. While the ZrO₂-doped resist showed no evident enhancement of sensitivity or transmittance, the TeO₂-doped resist showed enhancement in both properties. Based on these results, we confirmed that the addition of metals having high EUV light absorption to the EUV resist enhances its EUV light absorption and increases secondary electron emission, thereby enhancing PAG reactivity and improving acid generation efficiency.

Citation Download Citation

Atsushi Sekiguchi, Tetsuo Harada, and Takeo Watanabe "A study on enhancing EUV resist sensitivity", Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII, 1014322 (24 March 2017); https://doi.org/10.1117/12.2255650

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available