Uncertainty Of Multiple Determination Of Optical Constants And Layer Thicknesses Of Thin Films Case Of TiO2/Ag/TiO2 Coating On Glass

Valery A. Koss; Abraham Belkind; David E. Aspnes; Lawrence Nazar; Jerzy A. Dobrowolski; Fang C. Ho; Kazem Memarzadeh; John A. Woollam; F. Bernoux; Jean P. Piel

doi:10.1117/12.949932

6 March 1989 Uncertainty Of Multiple Determination Of Optical Constants And Layer Thicknesses Of Thin Films Case Of TiO₂/Ag/TiO₂ Coating On Glass

Valery A. Koss, Abraham Belkind, David E. Aspnes, Lawrence Nazar, Jerzy A. Dobrowolski, Fang C. Ho, Kazem Memarzadeh, John A. Woollam, F. Bernoux, Jean P. Piel

Author Affiliations +

Proceedings Volume 1016, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII; (1989) https://doi.org/10.1117/12.949932
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Multiply determined thicknesses of constituent layers and optical constants of Ag layer in Tio₂/Ag/TiO₂ coatings on glass are compared using regions of uncertainties for evaluated parameters. The measurements were done using spectroscopic ellipsometry and spectrophotometry. The regions of uncertainty for each evaluated parameter were obtained using a separately determined accuracy of measurements. It is shown that the actual structure of the coating is more complex than a three or five layer model.

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Valery A. Koss, Abraham Belkind, David E. Aspnes, Lawrence Nazar, Jerzy A. Dobrowolski, Fang C. Ho, Kazem Memarzadeh, John A. Woollam, F. Bernoux, and Jean P. Piel "Uncertainty Of Multiple Determination Of Optical Constants And Layer Thicknesses Of Thin Films Case Of TiO₂/Ag/TiO₂ Coating On Glass", Proc. SPIE 1016, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII, (6 March 1989); https://doi.org/10.1117/12.949932

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