Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

Ondřej Chmela; Jakub Sadílek; Jordi Samà; Albert Romano-Rodriguez; Jaromír Hubálek; Stella Vallejos

doi:10.1117/12.2265000

30 May 2017 Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C₂H₆O and NO₂

Ondřej Chmela, Jakub Sadílek, Jordi Samà, Albert Romano-Rodriguez, Jaromír Hubálek, Stella Vallejos

Author Affiliations +

Proceedings Volume 10248, Nanotechnology VIII; 102480F (2017) https://doi.org/10.1117/12.2265000
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO₃ nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.

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Ondřej Chmela, Jakub Sadílek, Jordi Samà, Albert Romano-Rodriguez, Jaromír Hubálek, and Stella Vallejos "Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C₂H₆O and NO₂", Proc. SPIE 10248, Nanotechnology VIII, 102480F (30 May 2017); https://doi.org/10.1117/12.2265000

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