Computer Generated Diffraction Patterns Of Rough Surfaces

Jan H. Rakels

doi:10.1117/12.950372

28 March 1989 Computer Generated Diffraction Patterns Of Rough Surfaces

Jan H. Rakels

Proceedings Volume 1029, Scattering and Diffraction; (1989) https://doi.org/10.1117/12.950372
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

It is generally accepted, that optical methods are the most promising for the in-process measurement of surface finish. These methods have the advantages of being non-contacting and fast data acquisition. In the Micro-Engineering Centre at the University of Warwick, an optical sensor has been devised which can measure the rms roughness, slope and wavelength of turned and precision ground surfaces. The operation of this device is based upon the Kirchhoff-Fresnel diffraction integral. Application of this theory to ideal turned surfaces is straightforward, and indeed the theoretically calculated diffraction patterns are in close agreement with patterns produced by an actual optical instrument. Since it is mathematically difficult to introduce real surface profiles into the diffraction integral, a computer program has been devised, which simulates the operation of the optical sensor. The program produces a diffraction pattern as a graphical output. Comparison between computer generated and actual diffraction patterns of the same surfaces show a high correlation.

Citation Download Citation

Jan H. Rakels "Computer Generated Diffraction Patterns Of Rough Surfaces", Proc. SPIE 1029, Scattering and Diffraction, (28 March 1989); https://doi.org/10.1117/12.950372

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