Excimer Lasers: Current Trends And Future Directions

J. Reid; G. Bishop; S. Hastie; B. Norris; R. Weeks; E. Williams; T. Znotins

doi:10.1117/12.951247

1 June 1989 Excimer Lasers: Current Trends And Future Directions

J. Reid, G. Bishop, S. Hastie, B. Norris, R. Weeks, E. Williams, T. Znotins

Proceedings Volume 1041, Metal Vapor Laser Technology and Applications; (1989) https://doi.org/10.1117/12.951247
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

This paper discusses the design and performance of a new excimer laser. The laser delivers output powers as high as 160 Watts on KrF with an efficiency of 4.5%, and has demonstrated gas lifetimes significantly better than any previously reported for high-power, commercial lasers. Details are given of an apparatus designed to determine the impurities which presently limit gas lifetime in excimer lasers.

Citation Download Citation

J. Reid, G. Bishop, S. Hastie, B. Norris, R. Weeks, E. Williams, and T. Znotins "Excimer Lasers: Current Trends And Future Directions", Proc. SPIE 1041, Metal Vapor Laser Technology and Applications, (1 June 1989); https://doi.org/10.1117/12.951247

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available