Open Access Paper
21 November 2017 Integrated optics interferometer for high precision displacement measurement
Dominique Persegol, Virginie Collomb, Vincent Minier
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Proceedings Volume 10569, International Conference on Space Optics — ICSO 2000; 105691H (2017) https://doi.org/10.1117/12.2307929
Event: International Conference on Space Optics 2000, 2000, Toulouse Labège, France
Abstract
We present the design and fabrication aspects of an integrated optics interferometer used in the optical head of a compact and lightweight displacement sensor developed for spatial applications.

The process for fabricating the waveguides of the optical chip is a double thermal ion exchange of silver and sodium in a silicate glass. This two step process is adapted for the fabrication of high numerical aperture buried waveguides having negligible losses for bending radius as low as 10 mm.

The optical head of the sensor is composed of a reference arm, a sensing arm and an interferometer which generates a one dimensional fringe pattern allowing a multiphase detection. Four waveguides placed at the output of the interferometer deliver four ideally 90° phase shifted signals.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dominique Persegol, Virginie Collomb, and Vincent Minier "Integrated optics interferometer for high precision displacement measurement", Proc. SPIE 10569, International Conference on Space Optics — ICSO 2000, 105691H (21 November 2017); https://doi.org/10.1117/12.2307929
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KEYWORDS
Waveguides

Interferometers

Head

Sensors

Integrated optics

Planar waveguides

Glasses

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