Patterning method impact on sub-36nm pitch interconnect variability

Nicholas V. LiCausi; James C.-H. Chen; R. S. Smith; E. Todd Ryan

doi:10.1117/12.2297117

20 March 2018 Patterning method impact on sub-36nm pitch interconnect variability

Nicholas V. LiCausi, James C.-H. Chen, R. S. Smith, E. Todd Ryan

Proceedings Volume 10588, Design-Process-Technology Co-optimization for Manufacturability XII; 1058804 (2018) https://doi.org/10.1117/12.2297117
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

As advanced semiconductor technologies continue to shrink, there is a continued need for interconnect performance and variability to keep pace. Traditional area scaling alone cannot control the increased process variation at advanced nodes. We examine the impact that patterning scheme has on the final interconnect resistance, capacitance and RC variability at sub-36nm pitches. Industry standard patterning schemes are evaluated using the Monte Carlo method. Single exposure (direct print), litho-etch-litho-etch, self-aligned double patterning and self-aligned quadruple patterning (SAQP) are considered. In the context of these patterning schemes, lithographic variation and spacer thickness uniformity (where applicable) are evaluated.

Citation Download Citation

Nicholas V. LiCausi, James C.-H. Chen, R. S. Smith, and E. Todd Ryan "Patterning method impact on sub-36nm pitch interconnect variability", Proc. SPIE 10588, Design-Process-Technology Co-optimization for Manufacturability XII, 1058804 (20 March 2018); https://doi.org/10.1117/12.2297117

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available