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The metrology approach is a sub-aperture stitching technique that uses a diffractive nulling element. This leverages the rapid production times of the lithography industry to reduce the lead time for test set assembly. For the most common convex component geometries, this test can be ready for use in as little as six months from receipt of specifications. We will present the development and design of this test methodology. Existing PHAST systems are providing high resolution and accurate data while demonstrating the stability of the overall approach. In addition, the approach is capable of rapid reconfiguration to accommodate testing of multiple convex optics over a range of sizes and specifications. |
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Computer generated holography
Optical alignment
Wavefronts
Optical testing
Aspheric lenses
Mirrors
Error analysis
