Presentation + Paper
7 September 2018 Mechanical characterization of planar springs for compact radiation pressure power meters
Alexandra B. Artusio-Glimpse, Ivan Ryger, Paul Williams, Kyle Rogers, Daniel Rahn, Andrew Walowitz, John Lehman
Author Affiliations +
Abstract
Counter to conventional methods of measuring laser optical power, radiation pressure-based power meters operate by reflection rather than absorption. This provides an opportunity for in situ, non-destructive total beam power measurement. Compact radiation pressure power meters designed to operate between a few tens and a few thousands of watts consist of a planar millimeter-scale spring-electrode-mirror component that deflects under radiation pressure from an incident beam. Spring constant, resonant frequency, and quality factor of microfabricated springs as well as coatinginduced straining of the spring are the focus of this manuscript. We compare finite element models of the mechanical component with various measurements to inform future designs.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexandra B. Artusio-Glimpse, Ivan Ryger, Paul Williams, Kyle Rogers, Daniel Rahn, Andrew Walowitz, and John Lehman "Mechanical characterization of planar springs for compact radiation pressure power meters", Proc. SPIE 10723, Optical Trapping and Optical Micromanipulation XV, 107230V (7 September 2018); https://doi.org/10.1117/12.2324334
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KEYWORDS
Mirrors

Semiconducting wafers

Silicon

Electrodes

Reflectivity

Power meters

Plasma enhanced chemical vapor deposition

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