Research on combined surface modification of single crystal silicon cylindrical mirror

Wanli Zhang; Feng Shi; Yifan Dai; Ci Song; Ye Tian

doi:10.1117/12.2504844

11 January 2019 Research on combined surface modification of single crystal silicon cylindrical mirror

Wanli Zhang, Feng Shi, Yifan Dai, Ci Song, Ye Tian

Proceedings Volume 10837, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 1083717 (2019) https://doi.org/10.1117/12.2504844
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

This article introduces the modification of single crystal silicon cylindrical mirror that combined immersed CCOS polishing with IBF polishing. In the processing of smoothing and modifying, the quality of the mirror’s surface has been further improved. In this experiment, we optimize the CCOS polishing process and improve the traditional CCOS polishing apparatus to polish the single crystal silicon convex cylindrical mirror. During the CCOS polishing process, the parameter were set as follows: pressure 0.4kPa, speed 25 r/min, polishing liquid concentration 4.5% (pH 10), polishing time 20 min. After polishing by CCOS, IBF is used on its heels. The parameter were set as follows: energy 1000-1200eV (Ar⁺ ion beam with low energy), incident angle of ion beam 90°, polishing time 30 min. The immersed CCOS polishing process and IBF polishing process iterated repeatedly until the surface quality of the single crystal silicon convex cylindrical mirror meets the requirement. After the polishing process, the sub aperture stitching method and Zygo interferometer are used to detect the surface. The PV value of the single crystal silicon convex cylindrical mirror is 0.265 lambda, the roughness is 0.679nm the residual Zernike is 70.5 nm after testing. The errors over the whole frequency band were significantly reduced. It could be seen from the above that the single crystal silicon convex cylindrical mirror had high accuracy and better profile on the surface after polishing process. The error over the whole frequency band also converged obviously. Therefore, the method that had been described in this paper could be used for the surface modification of single crystal silicon cylindrical mirror.

Citation Download Citation

Wanli Zhang, Feng Shi, Yifan Dai, Ci Song, and Ye Tian "Research on combined surface modification of single crystal silicon cylindrical mirror", Proc. SPIE 10837, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 1083717 (11 January 2019); https://doi.org/10.1117/12.2504844

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Polishing

Mirrors

Surface finishing

Silicon

Crystals

Ion beam finishing

Ion beams

Show All Keywords

Keywords/Phrases

Search In:

Publication Years