Laser micromachining of micro-structures on CVD diamond

Han Liu; Bing Guo; Mingtao Wu; Chunyu Zhang; Jun Zhang; Amr Monier; Qingliang Zhao

doi:10.1117/12.2514696

16 January 2019 Laser micromachining of micro-structures on CVD diamond

Han Liu, Bing Guo, Mingtao Wu, Chunyu Zhang, Jun Zhang, Amr Monier, Qingliang Zhao

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 108381T (2019) https://doi.org/10.1117/12.2514696
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Compared with conventional grinding tools, the chemical vapor deposition (CVD) diamond grinding tools have lots of advantages. However, the practical application of CVD grinding tools is limited, because of the small chip-holding space of abrasive layer. Based on the previous research, the structured grinding tools identified as an available method to improve grinding performance. Therefore, the micro-structured CVD diamond tools were invented. In this paper, the picosecond pulse laser was adopted to machine the micro-structures on CVD diamond. The ablation threshold of CVD diamond film was obtained with picosecond pulse laser. And then, the micro-grooves were machined on diamond film surface with different laser machining parameters. The effects of defocus, laser power, scanning speed, scanning times and machining offset on groove width and depth were analyzed respectively.

Citation Download Citation

Han Liu, Bing Guo, Mingtao Wu, Chunyu Zhang, Jun Zhang, Amr Monier, and Qingliang Zhao "Laser micromachining of micro-structures on CVD diamond", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108381T (16 January 2019); https://doi.org/10.1117/12.2514696

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