Analysis on the evolution of subwavelength ripples fabricated by ultrafast laser pulses on lithium niobate crystal surface

Yanan Li; Qiang Wu; Qiang Li; Zhixuan Li; Mengyao Cao; Chunling Zhang; Jianghong Yao; Jingjun Xu

doi:10.1117/12.2505929

6 February 2019 Analysis on the evolution of subwavelength ripples fabricated by ultrafast laser pulses on lithium niobate crystal surface

Yanan Li, Qiang Wu, Qiang Li, Zhixuan Li, Mengyao Cao, Chunling Zhang, Jianghong Yao, Jingjun Xu

Author Affiliations +

Proceedings Volume 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology; 108420A (2019) https://doi.org/10.1117/12.2505929
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Currently, periodic structures on lithium niobate crystal surface exhibit extensive application prospects in related fields of on-chip photonic-integrated platforms and nanophotonics. We fabricated periodic ripple structures on the surface of lithium niobate crystal by femtosecond laser pulses irradiation and observed the evolution of these structures irradiated by 50,100,500,1000 laser pulses respectively. The morphology of surface structure became more uniform with the increasing number of laser pulses. Especially fabricated by 1000 pulses, regular ripples were found over the ablation area. The direction of ripples is perpendicular to the laser polarization and the period is around 190 nm, which was calculated by 2D-Fast Fourier Transform. By Finite-Difference Time-Domain method, we simulated the effect of the initial periodic structure on subsequent energy distribution. Numerical simulation results show that energy is deposited in the grooves between the ripples. Therefore, the ablation of grooves is more efficient, and the ripples morphology resulting from subsequent laser pulses irradiation becomes more uniform. The simulation results are consistent with the experimental results. This research is considerably valuable for controlling precisely periodic micro- and nanostructures formation and providing innovative laser manufacturing technology for wide bandgap material.

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Yanan Li, Qiang Wu, Qiang Li, Zhixuan Li, Mengyao Cao, Chunling Zhang, Jianghong Yao, and Jingjun Xu "Analysis on the evolution of subwavelength ripples fabricated by ultrafast laser pulses on lithium niobate crystal surface", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 108420A (6 February 2019); https://doi.org/10.1117/12.2505929

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KEYWORDS

Crystals

Laser crystals

Femtosecond phenomena

Ultrafast lasers

Finite-difference time-domain method

Laser ablation

Lithium niobate

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