Research on integrated readout circuit of temperature, humidity and pressure sensor

Yuheng Shen; Zheng Qin; Cheng Zhang; Weiwei Meng; Longcheng Que; Yun Zhou; Guangzhong Xie

doi:10.1117/12.2506358

8 February 2019 Research on integrated readout circuit of temperature, humidity and pressure sensor

Yuheng Shen, Zheng Qin, Cheng Zhang, Weiwei Meng, Longcheng Que, Yun Zhou, Guangzhong Xie

Proceedings Volume 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging; 108430X (2019) https://doi.org/10.1117/12.2506358
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Nowadays, the use of multiple sensors for environmental detection could overcome the uncertainty and limitations of a single detector. Micro-integrated sensors composed of multiple sensors have become the development trend of future sensors. This paper describes the implementation of a multi-sensor signal processing circuit. By monitoring external signals through temperature sensor, humidity sensor, and pressure sensor, the physical quantity of sensors is converted into a digital signal output by integrated readout Circuit. And a novel switched capacitor circuit is proposed. In this paper ,the readout circuit designed on a 0.5μm typical process, the sensitivity of temperature is less than 0.5°C, the accuracy of on-chip ADC is 14bit, and the overall power consumption is less than 20mW. It lays the foundation for multi-sensor composite integration and miniaturization research.

Citation Download Citation

Yuheng Shen, Zheng Qin, Cheng Zhang, Weiwei Meng, Longcheng Que, Yun Zhou, and Guangzhong Xie "Research on integrated readout circuit of temperature, humidity and pressure sensor ", Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 108430X (8 February 2019); https://doi.org/10.1117/12.2506358

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KEYWORDS

Sensors

Humidity

Signal processing

Capacitors

Switches

Integrated circuit design

Integrated circuits

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