Study on preparation and sensitive properties of Ag-doped ZnO thin films

Huiqun Zhu; Chunbo Li; Lekang Li; Hui Li

doi:10.1117/12.2505519

12 December 2018 Study on preparation and sensitive properties of Ag-doped ZnO thin films

Huiqun Zhu, Chunbo Li, Lekang Li, Hui Li

Proceedings Volume 10846, Optical Sensing and Imaging Technologies and Applications; 108462K (2018) https://doi.org/10.1117/12.2505519
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

Zinc oxide thin films with Ag dopant (ZnO:Ag) were prepared on n-type silicon and quartz substrates by co-sputtering and post annealing. The ZnO:Ag thin films were measured by means of ultraviolet-visible spectrophotometer, fluorescence spectrophotometer, Hall Effect and I-V experiment. Optical measurement results show that the average transmittance of ZnO:Ag thin films in the wavelength range of 200~850 nm decrease with the increase of Ag content. The Hall effect measurement results show that the corresponding hole concentration of the ZnO:Ag film is 1.29×10²¹ cm^-3 . This reveals that the ZnO:Ag film is really p-type behavior. The sensitivity of p-ZnO:Ag/n-Si heterojunction structure is 0.1985. The devices based on p-type ZnO:Ag thin films have a good ultraviolet light (360 nm) sensitive properties.

Citation Download Citation

Huiqun Zhu, Chunbo Li, Lekang Li, and Hui Li "Study on preparation and sensitive properties of Ag-doped ZnO thin films", Proc. SPIE 10846, Optical Sensing and Imaging Technologies and Applications, 108462K (12 December 2018); https://doi.org/10.1117/12.2505519

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