A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage

Liang Zhou; Zhi Li; Mengyue Liang; Yanping Chen; Xiaoyang Zhang; Huikai Xie

doi:10.1117/12.2507659

4 March 2019 A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage

Liang Zhou, Zhi Li, Mengyue Liang, Yanping Chen, Xiaoyang Zhang, Huikai Xie

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310B (2019) https://doi.org/10.1117/12.2507659
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Fiber scanning for forward-view imaging method has been widely used in biomedical imaging. It also attracts great interest in the fields of virtual and augmented reality. In this study, we propose a fiber scanner actuated by a robust Cu/W electrothermal MEMS stage which can be driven quasi-statically. The Cu/W MEMS stage is successfully fabricated after overcoming Cu oxidization. Compared to previous Al/SiO₂ MEMS stages, this new Cu/W MEMS stage, which generates 0.7 mN forces at 1.8 V, offers three times more force. The MEMS stage can travel up to 53 μm at only 1.8 V. A single-mode fiber is assembled on the central platform of the MEMS stage to form a fiber scanner. The travel range can be amplified by four times.

Conference Presentation

Citation Download Citation

Liang Zhou, Zhi Li, Mengyue Liang, Yanping Chen, Xiaoyang Zhang, and Huikai Xie "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310B (4 March 2019); https://doi.org/10.1117/12.2507659

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