A new type of liquid-crystal cylindrical microlens arrays with nonuniform microcoil electrodes

Mingce Chen; Zheng Li; Qi Shao; Xinjie Han; Zhaowei Xin; Dong Wei; Xinyu Zhang; Haiwei Wang; Changsheng Xie

doi:10.1117/12.2507741

1 March 2019 A new type of liquid-crystal cylindrical microlens arrays with nonuniform microcoil electrodes

Mingce Chen, Zheng Li, Qi Shao, Xinjie Han, Zhaowei Xin, Dong Wei, Xinyu Zhang, Haiwei Wang, Changsheng Xie

Proceedings Volume 10941, Emerging Liquid Crystal Technologies XIV; 109410U (2019) https://doi.org/10.1117/12.2507741
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

In this paper, we propose a new type of liquid-crystal cylindrical microlens arrays (LCCMAs) with nonuniform microcoil electrodes (NMEs). The key functional microstructure of the LCCMAs includes two ~500-μm-thick glass substrates with indium-tin-oxide (ITO) films for shaping the top and the bottom electrodes and a thin LC layer with a typical thickness of 20μm. The ITO film of the upper substrate is etched into the shape of nonuniform microcoil by traditional lithography process and inductively coupled plasma etching (ICP etching). By simply adjusting voltage signal applied on the NMEs, the LCCMAs exhibit relatively sharp point spread functions (PSFs) at the focal plane of different spectral beams including red (635-671nm), green (501-561nm) and blue (430-473nm) lasers at relatively low signal voltages (even less than 3Vrms).

Citation Download Citation

Mingce Chen, Zheng Li, Qi Shao, Xinjie Han, Zhaowei Xin, Dong Wei, Xinyu Zhang, Haiwei Wang, and Changsheng Xie "A new type of liquid-crystal cylindrical microlens arrays with nonuniform microcoil electrodes", Proc. SPIE 10941, Emerging Liquid Crystal Technologies XIV, 109410U (1 March 2019); https://doi.org/10.1117/12.2507741

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