Chemical characterization of SiO2:TiO2 waveguide films using Auger electron spectroscopy

Alina Domanowska

doi:10.1117/12.2522272

15 March 2019 Chemical characterization of SiO₂:TiO₂ waveguide films using Auger electron spectroscopy

Alina Domanowska

Proceedings Volume 11045, Optical Fibers and Their Applications 2018; 1104507 (2019) https://doi.org/10.1117/12.2522272
Event: 18th Conference on Optical Fibers and Their Applications, 2018, Naleczow, Poland

Abstract

The aim of the work is to apply the Auger Electron Spectroscopy to determine the chemical composition and uniformity of silica-titania SiO₂:TiO₂ waveguide films which were fabricated via sol-gel method. The SiO₂:TiO₂ waveguide layers are routinely produced on glass substrates, however, for the research presented in the paper, they were made on silicon substrates. We registered series of 50 Auger spectra on the different depths in the structure. The result show that the structure is chemically and structurally uniform through the whole depth.

Citation Download Citation

Alina Domanowska "Chemical characterization of SiO₂:TiO₂ waveguide films using Auger electron spectroscopy", Proc. SPIE 11045, Optical Fibers and Their Applications 2018, 1104507 (15 March 2019); https://doi.org/10.1117/12.2522272

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