A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production

Adam Smith; Hari Konnanur

doi:10.1117/12.2539039

26 September 2019 A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production

Adam Smith, Hari Konnanur

Author Affiliations +

Proceedings Volume 11148, Photomask Technology 2019; 111481L (2019) https://doi.org/10.1117/12.2539039
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States

Abstract

Over the last few decades, the scope of MDP has evolved from a handful of simple tasks, to veritable “jack of all trades”, capable of an enormous array of functions, in several different operational scenarios. These functions range from machine-specific fractures, to Boolean operations, OPC, MPC, checking, and beyond, under various scenarios including specific hardware configurations (such as single CPU vs. cluster, memory size, type, and location), software configurations (including operating system, load balancing, and prioritization), and inputs and outputs (formats, sizes, and so forth). While this versatile capability of tools, such as Synopsys’ CATS software, is powerful, the expertise required to operate them efficiently keeping abreast of the changing requirements and capabilities, poses a significant challenge to the average user.

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Adam Smith and Hari Konnanur "A case study of benefits for the "IOFF" MDP automation project: development, integration, and optimization of the Integrated-Optimized-Fracture-Flow (IOFF) into production", Proc. SPIE 11148, Photomask Technology 2019, 111481L (26 September 2019); https://doi.org/10.1117/12.2539039

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