Position observer based galvanometer scanner and XY stage synchronization for large area processing

Keith J. Dowling; Bhavesh A. Bhut; Mark S. Lucas; Seethram Sivam; Yu John Hsu; Amit Shahar; Jin Li

doi:10.1117/12.2546482

2 March 2020 Position observer based galvanometer scanner and XY stage synchronization for large area processing

Keith J. Dowling, Bhavesh A. Bhut, Mark S. Lucas, Seethram Sivam, Yu John Hsu, Amit Shahar, Jin Li

Proceedings Volume 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV; 1126713 (2020) https://doi.org/10.1117/12.2546482
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

In this paper we present a novel sub-system for synchronizing motion of the galvanometer-based scanner and the XY stage system using a compact single controller that is independent of XY stage type or manufacturer. This integration directly utilizes the stage’s encoder output to compensate its motion in real time. Better than 10μm accuracy is demonstrated with various application patterns.

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Citation Download Citation

Keith J. Dowling, Bhavesh A. Bhut, Mark S. Lucas, Seethram Sivam, Yu John Hsu, Amit Shahar, and Jin Li "Position observer based galvanometer scanner and XY stage synchronization for large area processing", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126713 (2 March 2020); https://doi.org/10.1117/12.2546482

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