From proof of principle to 98.5% yield of a high-speed laser processing tool

Ralf Terbrueggen

doi:10.1117/12.2556012

11 March 2020 From proof of principle to 98.5% yield of a high-speed laser processing tool

Ralf Terbrueggen

Proceedings Volume 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV; 1126717 (2020) https://doi.org/10.1117/12.2556012
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

There have been great inventions, discoveries and developments of sophisticated laser processes in the recent past, many with highly complex lasers and optical setups. In order to be able to successfully introduce these processes for industrial applications, laser processing tools have to reliably demonstrate high efficiencies and yields and achieve an attractive cost per part value. This requires the fundamental understanding of the laser-material interaction mechanisms and of the factors which can influence the process. The associated challenges and solutions for industry hardened tools for the processing of technical glass substrates with ultrashort lasers are presented.

Conference Presentation

Citation Download Citation

Ralf Terbrueggen "From proof of principle to 98.5% yield of a high-speed laser processing tool", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126717 (11 March 2020); https://doi.org/10.1117/12.2556012

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